铌酸锂集成MZI型光波导大电流传感器

Lithium niobate integrated MZI optical waveguide high current sensor

采用集成光学技术,设计与研制出了一种用于大电流测量的集成光波导电流传感器,器件体积为78 mm×18 mm×9 mm。对带有多环形天线和调制电极的传感器结构进行了理论分析,并利用COMSOL Multiphysics软件建立传感器的三维模型,仿真验证了所设计的传感器可用于脉冲大电流的测量。搭建了脉冲大电流测量实验系统,对传感器性能进行测试。结果表明,传感器测量得到的脉冲电流时域波形与Pearson电流互感器测量得到的脉冲电流时域波形相比,波前时间T_(f)和持续时间T_(d)的平均相对误差分别为3.9775%和5.4375%。传感器在100~3300 A的被测电流范围内,线性相关系数为0.99897,当信噪比为6 dB时,传感器最小可测电流为66 A。

Adopting integrated optical technology,an integrated optical waveguide current sensor for high current measurement is designed and developed,the size of the device is 78 mm×18 mm×9 mm.The theoretical analysis of the sensor structure with multiple loop antennas and modulation electrodes is carried out.The COMSOL Multiphysics software is used to establish a three-dimensional model of the sensor,the simulation results show that the designed sensor can be used to measure the pulse high current.The experiment system for pulse high current measurement was built to test the performance of the sensor.The results show that when the pulse current time domain waveform measured by the sensor is compared with that measured by the Pearson current transformer,the mean relative errors of the wavefront time T_(f) and the duration time T_(d) are 3.9775% and 5.4375%,respectively.The linear correlation coefficient is 0.99897 in the measured current range of 100~3300 A.When the SNR is 6 dB,the minimum measurable current of the sensor is 66 A.