靶材中Al含量对TiAlCN涂层结构和耐磨性能的影响

Effect of Target Composition on Microstructure and Wear Resistance of Composite TiAlCN Coatings Fabricated by Magnetron Sputtering

异质原子掺杂的TiN涂层具有优异的耐磨、耐蚀性能和高温稳定性,这可为提高镁合金的表面性能和扩大镁合金材料的应用提供一种技术支持。采用Al,C双原子掺杂于TiN晶格,以合金靶材中Al原子的比例为变量,采用磁控溅射法在AZ91表面制备了Al-C原子共掺杂的涂层,并获得不同Al含量的TiAlCN涂层。采用X射线小角掠入射(GIXRD)、扫描电子显微镜(SEM)和销盘式摩擦磨损试验机研究了Al原子掺杂比例对TiAlCN涂层结构和耐磨性的影响。结果表明:涂层包含FCC结构TiN,AlN,TiCN三种物相,随着Al原子掺杂比例的增加,涂层生长的择优取向发生变化,晶粒尺寸增大,AlN相含量增加,涂层的摩擦系数和磨损率减小,40 at%Al的涂层耐磨性能最好。

TiN coating doped with heterogeneous atoms has excellent wear resistance and corrosion resistance,as well as high temperature stability,which can provide a technical support for improving the surface properties of magnesium alloys and expanding the applications of magnesium alloys.The Al-C co-doped coatings were prepared by magnetron sputtering on the surface of AZ91 with Al-Ti alloy target,and TiAlCN coatings with different Al contents were obtained.The structure and wear resistance of TiAlCN coating were characterized by glancing incident X-ray with small angle(GIXRD),scanning electron microscope(SEM)and pin-disc friction and wear testing machine.The effects of Al atom doping ratio on the structure and wear resistance were studied.The results show that the coating contains three phases of FCC structure TiN,AlN and TiCN.With the increase of Al atom doping ratio,the preferred growth orientation of the coating changed,the grain size increased,the content of AlN phase increased,the friction coefficient and wear rate of the coating decreased,and the wear resistance of the coating with 40 at%doping presented the best wear resistance.