摘要
针对自动粗铝丝超声楔焊键合的尾丝质量问题,剖析了键合尾丝的形成机理,建立了键合尾丝缺陷故障树,构建了键合尾丝缺陷的因果关系图,提出了尾丝缺陷现象与根源因素的影响关系矩阵,确立了尾丝质量控制的关键控制点和控制要求。
Wire tail defects exposed in ultrasonic wedge bonding on automatic heavy wire bonder were examined, and the generating mechanism of wire tail was analyzed. A wire tail fault tree was set up, a tail defects’ fishbone diagrams was built, and a relationship matrix between the phenomenon of tail wire defect and its root cause factors was proposed. The key factors and requirements of tail quality controlling were established.
作者
贺从勇
李双江
HE Congyong;LI Shuangjiang(The 24th Research Institute of China Electronics Technology Group Corp.,Chongqing400060,P.R.China)
出处
《微电子学》
CAS
北大核心
2022年第3期513-518,共6页
Microelectronics
基金
重庆科委基金资助项目(cstc2021jcyj-bsh0246)。
关键词
粗铝丝键合
尾丝
质量控制
heavy aluminium wire bonding
wire tail
quality control