化学气相沉积大尺寸多晶金刚石膜及其应用研究进展

A Review on Preparation and Application of Large Area Polycrystalline Diamond Films by Chemical Vapor Deposition

人工合成金刚石技术极大地推动了工业技术的进步,并有望进一步为科学技术的发展带来革命性的突破。本文介绍了人工合成金刚石技术,详细分析了几种主要化学气相沉积方法的技术特点、应用领域及发展现状。重点介绍了微波等离子体化学气相沉积大尺寸高品质光学级金刚石膜的发展和现状。最后,对大尺寸光学级金刚石膜在兆瓦级回旋管、高功率CO_(2)激光器以及红外热成像等领域的应用进行了简单介绍。

Synthetic diamond has greatly promoted the progress of industrial technology and is expected to bring further revolutionary breakthroughs.Diamond synthesis technology is introduced.The technical characteristics,application fields and development status of four main chemical vapor deposition methods are analyzed in detail.The development and current status of high-quality large area optical grade diamond films prepared by microwave plasma chemical vapor deposition are especially highlighted.And the applications of large area optical grade diamond films in megawatt gyrotron,high-power CO_(2)laser and infrared thermography are introduced briefly.