非球面面型检测新原理及误差源分析建模研究

The New Principles of Aspherical Surface Detection and Analysis of Modeling of Error Sources

针对当前非球面元件面型检测设备存在的不足,提出了一种基于最接近圆法的非球面面型检测新原理,描述了该检测原理的实施过程,建立了该检测原理的数学模型,同时,以该原理为核心构建了原理样机的总体结构,并解析了原理样机的检测轨迹;针对原理样机的实体模型进行了综合误差源分析,基于多提系统理论建立了原理样机的拓扑结构、相邻体的理想变换矩阵和实际运动变换矩阵,并最终建立了原理样机的综合误差模型,为后续原理样机实施误差补偿奠定了坚实基础。

In view of the shortcomings of the current aspheric element surface detection equipment,a new principle of aspheric surface detection based on the closest circle method is proposed,the implementation process of the detection principle is described,and the mathematical model of the detection principle is established.Based on this principle,the overall structure of the principle prototype was constructed,and the detection trajectory of the principle prototype was analyzed;a comprehensive error source analysis was carried out for the physical model of the principle prototype,and the topological structure and phase of the principle prototype were established based on the multi-system theory.The ideal transformation matrix of the neighbors and the actual motion transformation matrix,and finally the comprehensive error model of the principle prototype is established,which lays a solid foundation for the implementation of error compensation of the subsequent principle prototype.