摘要
结合压电电机响应快,定位精度高及控制性能好的特点,设计了一款基于压电电机的光学稳像运动平台。利用COMSOL对电机定子进行有限元仿真,分析了定子的工作原理及响应特性。通过实验测得电机的最佳工作频率及预压力,并分析了响应速度与激励电压、工作频率、预压力之间的关系。采用多种控制方法进行定位测试,利用PID加步进的复合控制模式,实现了误差250 nm内的较高精度定位控制。
An optical image stabilization platform is designed utilizing the characteristics of fast response,high positioning accuracy and good control performance of piezoelectric motor.The finite element simulation of the motor stator is carried out by COMSOL,and the working principle and response characteristics of the stator are analyzed.The optimum operating frequency and pre-pressure of the motor are measured by experiments,and the relationship among the response speed and the excitation voltage,operating frequency and pre-pressure is analyzed.A variety of control methods are used for positioning test and the high-precision positioning control with error of less than 250 nm has been realized by using a composite control of PID and stepping.
作者
李兴
时运来
孙海超
王强
刘伟
LI Xing;SHI Yunlai;SUN Haichao;WANG Qiang;LIU Wei(State Key Lab.of Mechanics and Control for Aerospace Structures,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)
出处
《压电与声光》
CAS
北大核心
2024年第1期48-53,共6页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金面上资助项目(No.51975282)。
关键词
压电电机
光学稳像
有限元仿真
PID
定位控制
piezoelectric motor
optical image stabilization
finite element simulation
PID
positioning control
