集成电路废水的达标排放、资源回收和再生处理

The discharge,recovery,and reuse treatments of integrated circuit industry wastewater

集成电路产业是支撑经济社会发展的战略性、先导性产业,其用水量和排水量均较高。分析了集成电路废水的水质特征,主要包括各生产环节产生的含氨、含氟、酸碱、有机、含铜和研磨废水。针对含不同物质废水,总结了废水达标排放、资源回收和再生处理技术的应用现状与研究进展。在废水达标排放方面,实际工程中常采用混凝沉淀、过滤和吸附等处理含氟、含铜和研磨废水;采用活性污泥法、膜生物反应器、水解酸化和内循环厌氧反应器等处理含氨和有机废水;近年来磁混凝和高级氧化等技术也备受关注。在资源回收方面,目前主要采用超滤和电渗析等技术回收氟、铜和四甲基氢氧化铵等。废水回用方面,主要采用混凝沉降,膜生物反应器和膜过滤技术;反渗透技术是废水再生处理的核心,其目标是制备工业纯水用于集成电路制造。最后针对集成电路废水处理系统现存的问题,建议完善废水分类分质收集系统;强化去除重金属和难降解有机物,降低废水的生物毒性;使用预处理、污堵监测、膜清洗、开发新型膜材料等方法控制反渗透膜的污堵。

Integrated circuit industry is a strategic,fundamental and pilot industry that supports economic and so-cial development.It has high water consumption and drainage.The quality characteristics of integrated circuit waste-waters were classified,including ammonia wastewater,fluorine wastewater,acid and alkali wastewater,organic waste-water,copper wastewater,and grinding wastewater.The treatment processes and technologies of up-to-standard dis-charge,pollutant resource recovery,and water reuse treatment of wastewater containing different pollutants were sum-marized.The physicochemical processes for up-to-standard discharge treatment included coagulation sedimentation,filtration and adsorption to treat fluorine-containing,copper-containing and grinding wastewater,and biochemical pro-cesses included hydrolytic acidification,internal circulation anaerobic reactor,AO,and membrane bioreactor to treat ammonia-containing and organic wastewater.Advanced oxidation and electrolysis technology received much attention in recent years.The resource recovery technologies for pollutants such as fluorine,copper and tetramethylammonium hydroxide in wastewater included ultrafiltration and electrodialysis.Wastewater reuse treatment technologies and pro-cesses included coagulation sedimentation,membrane bioreactor and filtration.Reverse osmosis was the core of waste-water reuse treatment,with the goal of producing industrial pure water for integrated circuit manufacturing.Finally,the problems faced in wastewater treatment were discussed.Corresponding control methods were suggested:improving the collection system,strengthening the removal of heavy metals and refractory organic pollutants to reduce the biological toxicity of wastewater,and using pretreatment,fouling monitoring,membrane cleaning,and developing new mem-brane materials methods to control reverse osmosis membrane fouling.