微牛级电磁力标定装置仿真与测试研究

Simulation and testing research on micro Newton levelelectromagnetic force calibration device

如何获得高精度标定力是微牛级推力测量的重要基础。本文构建了C型磁路结构和矩形线圈组合方式以产生高精度宽范围电磁标定力。利用有限元方法分析了该装置特征区域磁场分布,对矩形线圈与磁体相对位置影响进行了讨论,最后搭建标定实验平台并进行标定实验。得到主要结论:在特征区域范围内磁场分布均匀性较好,最大差异率仅为0.7%;电流在10μA~20.2 mA范围调节时,电磁力标定范围为0.097~237.32μN,实验测量数据与仿真结果最大误差为1.73%;当线圈电流分辨率为10μA时,标定力实测分辨率优于0.1μN。

How to obtain high-precision calibration force is an important foundation for micro Newton level thrust measurement.In this paper,a C-type magnetic circuit structure and a rectangular coil combination method are constructed to generate high-precision and wide-range electromagnetic calibration force.The magnetic field distribution in the characteristic region of the device was analyzed using the finite element method,and the influ⁃ence of the relative position of the rectangular coil and the magnet was discussed.Finally,a calibration experi⁃mental platform was established and calibration experiments were conducted.The main conclusions are as fol⁃lows:within the characteristic region,the magnetic field distribution uniformity is good,and the maximum differ⁃ence rate is only 0.7%;When the current is adjusted in the range of 10μA to 202 mA,the calibration range of electromagnetic force is 0.097 to 237.32μN,and the maximum error between experimental measurement data and simulation results is 1.73%;When the coil current resolution is 10μA,the measured resolution of the cali⁃bration force is better than 0.1μN.