上海市集成电路行业节水发展现状与对策建议

Status and strategies for water conservation in integrated circuit industry of Shanghai

集成电路行业是我国大力发展的战略性和先导性产业,但在其发展过程中面临高耗水、高污染、高耗能等问题。本文以上海市30余家集成电路企业为例,分析了集成电路材料、晶圆制造及封装测试等典型集成电路行业的用水结构及节水现状。从技术层面,源头纯水制备优化、浓水分级分质利用、清洗过程控制、工艺水分级收集利用等手段,是进一步提升企业节水水平的重要方法。从管理体系层面,结合集成电路产品特点优化节水评价指标体系,构建区域协同的用水-排水-回收-循环利用体系,有望进一步强化对集成电路行业节水创新水平的科技支撑,助力集成电路行业绿色高质量发展。

Integrated circuit industry is a strategic and leading industry in China,which plays a vital role in many fields related to economic and social development.However,during its producing process,the integrated circuit industry still suffers from many problems such as high water consumption,high pollution and high energy consumption.Taking more than 30 integrated circuit companies in Shanghai as examples,this study analyzes the water use structure and water-saving status of typical companies of integrated circuit materials producing,wafer manufacturing,and chips packaging and test.It is suggested that,optimization of pure water preparation,utilization of concentrated water according to water quality,improving the cleaning technology,collection of process water separately are important means to improve the water-conservation level.Finally,in order to promote the high-quality development of the integrated circuit industry,an overall strategy of water use-drainage-collection-recycling system based on regional collaboration is proposed.