摘要
本文提出应用扫描离子束云纹法测量微电子机械系统面内变形的新方法.对该方法的测量原理以及实验技术进行了详尽地阐述.通过平行云纹典型实验对本方法的测量精度进行了检验.成功地将扫描离子束云纹法应用于微悬臂梁表面氧化层随时间生长所引起的变形测量.实验结果表明了该方法的可行性.
A new high resolution microscopic moiré method is proposed to measure the inplane deformation of object in a micrometer scale. The principle of this method and the accuracy of the deformation measurement are discussed in detail. The high resolution microscopic moiré method is successfully used to measure the surface strain evolution of a microcantilever under air oxidization. The results demonstrate the feasibility of this method.
出处
《实验力学》
CSCD
北大核心
2003年第1期12-16,共5页
Journal of Experimental Mechanics
关键词
扫描离子束云纹法
高频光栅
应变
微电子机械系统
面内变形
high resolution microscopic moiré method
strain
micro-electro-mechanical system(MEMS)
in-plane strain