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超薄膜多中心生长的多重分形分析

Multifractal Analysis on Multiple Cluster Growth of Ultra-thin Films
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摘要 模拟不同沉积速率下超薄膜多中心生长过程。结果显示:随着沉积率的降低,团簇数减少,团簇的平均分形维数增加。在团簇生长期间,当沉积率保持不变时,团簇的内部粒子在聚集之前比其边缘粒子经历更长时间的台面扩散。团簇不同部分的粒子的扩散时间分布能用多重分形谱来描述,沉积率越低,多重分形谱越宽。 The multiple cluster growth process of ultra-thin films at different deposition rates has been simulated. It is shown that the number of clusters decreases with the decreasing deposition rate, while the average fractal dimension of clusters increases. During the clusters growth with equal deposition rate, the inner particles of a cluster undergo a much larger diffusion steps(longer diffusion time)before aggregation on the substrate than the peripheral particles of the cluster. The distribution of the diffusion time of parti- cles located in various parts of clusters can be described by multifractal spectrum f(a).The results show that the lower the deposition rate,the wider the multifractal spectrum f(a).
出处 《阜阳师范学院学报(自然科学版)》 2002年第2期1-5,共5页 Journal of Fuyang Normal University(Natural Science)
关键词 超薄膜 多中心生长 多重分形分析 MONTE-CARLO模拟 薄膜生长 沉积速率 Monte-Carlo simulation Thin film growth Multifractal
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