摘要
本文介绍了第一届国际金刚石薄膜应用会议上有关制备技术的最新发展,讨论了目前金刚石薄膜的应用方向、存在的问题,以及要进入市场所必须解决的关键技术。
The latest developments of diamond film fabrication technology in the first international conference on diamond film applications is presented. The current trends and problems to be solved for diamond film application and the key technologies for the eommercial production are also discussed.
出处
《微细加工技术》
1992年第1期51-58,共8页
Microfabrication Technology