摘要
提出一种几何屏蔽的物理模型,用平均的方法定量计算了气相沉积薄膜中柱状结构的斜生长方向,并且用此模型对Thornton的结构区域图中1区和T区的形成进行了半定量的解释。
A physical model of oblique growth is established in the case of films deposited under the condition of low mobility. The mean orientation direction of the columnar is calculated and a semi-quantitative explanation of the formation condition of Zone 1 and Zone T in Thornton's SZM is given by means of calculations with this model.
出处
《真空科学与技术》
CSCD
1992年第5期371-378,共8页
Vacuum Science and Technology
基金
国家自然科学基金资助 (NsPC.9587007)