摘要
光开关是未来全光网络中关键的光交换器件。MEMS技术由于其自身的诸多优点而被认为是目前最有前景的光器件制作技术之一。本文简要论述了MEMS光开关与其他类型光开关的区别,介绍了MEMS光开关的特性,并分别就二维、三维及最近提出的一维MEMS光开关进行了介绍和比较。最后,综合探讨了MEMS光开关目前所面临的各种挑战。
Optical switches will become key components for optical switching in the future all?鄄optical network. MEMS technology is thought as one of the most prospective manufacturing technologies for optical components. Firstly,the differences between MEMS optical switches and some other optical switches are compactly stated and some characteristics about MEMS optical switches are introduced in this paper. Then,2D,3D and especially the new 1D MEMS optical switch are introduced respectively and comparisons between them are made. Finally,different challenges faced by MEMS optical switches are synthetically discussed.
出处
《微纳电子技术》
CAS
2004年第5期19-23,共5页
Micronanoelectronic Technology
基金
教育部优秀青年教师资助计划项目(教人司2002-350号)
教育部留学回国人员科研启动基金资助项目(教外司留2002-247号)
