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全数字化激光直写转台系统

An all-digital rotating platform system for laser direct writer
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摘要 为提高极坐标激光直写设备的性能,设计成全数字化的转台系统,增强了与平台、调焦、 光强系统的同步。提出数字锁相积分、可编程PID控制及变周期稳速判据等概念,并应用于转台控制器设计。配合改进的快速光强调制系统,使极坐标激光直写设备具备制作精确环、任意弧和变宽线条的能力。 In order to improve the performance of a polar-coordinate laser direct writer(PLDWs), an all- digital rotating platform system is designed. This unit enhances its synchronization with platform, focusing and light intensity control system. The ideas such as digital phase-locked integration, program- mable PID control and variable cycle speed stabilizing criterion etc, are proposed and applied to the design of the control of rotating platform system. With the help of advanced rapid light intensity modulation system, the PLDWs has the capability of manufacturing accurate ring, arbitrary arc and variable line width.
作者 梁宜勇
出处 《光电工程》 CAS CSCD 北大核心 2004年第5期1-3,10,共4页 Opto-Electronic Engineering
基金 国家863高技术项目资助
关键词 激光直写 转台系统 微光学 Laser direct writing Rotating platform system Micro-optics
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  • 1何立民.单片机应用系统设计[M].北京航空航天大学出版社,1992..
  • 2曲家骐 王季秩.伺服控制系统中的传感器[M].北京:机械工业出版社,1999..
  • 3吴一辉.纳米分辨率压电式定位系统的研究.中国科学院长春光学精密机械研究所博士论文[M].,1996..
  • 4[1]Gale M T,Rossi M,Pedersen jrn,et al.Fabrication of continuous-relief micro-optical elements by laser beam writing in photoresists.Opt Eng,1994,32(11):3556~3566
  • 5[2]Chan Yuen Chnen.Development and applications of laser writing lithography.Opt Eng,1998,37(9):2521~2530
  • 6[3]Langlois P,Jerominek H,Leclerc L et al.Diffractive optical elements fabricated by laser direct writing and other techniques.Proc SPLE,1992,1751:2~12
  • 7[4]Su Heng,Wang M R.Laser direct-write optical grating lenses and lenslet arrays on glass for optical interconnect applications.Proc SPLE,1996,2891:82~87
  • 8[5]Goltsos W,Liu Sharlene.Polar Coordinate laser writer for binary optics Fabrication.Proc SPLE.1990,1221:137~147
  • 9[6]Harurna M,Takahashi M,Wakahayashi K,et al.Laser beam lithographed micro-Fresnel lenses.Appl Opt,1990,29(34):5120~5126
  • 10[7]Bowen,J P,Michaels R L,Blough C G.Generation of large-diameter diffractive elements with laser pattern generation.Appl Opt,1997,36(34):8970~8975

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