摘要
为提高极坐标激光直写设备的性能,设计成全数字化的转台系统,增强了与平台、调焦、 光强系统的同步。提出数字锁相积分、可编程PID控制及变周期稳速判据等概念,并应用于转台控制器设计。配合改进的快速光强调制系统,使极坐标激光直写设备具备制作精确环、任意弧和变宽线条的能力。
In order to improve the performance of a polar-coordinate laser direct writer(PLDWs), an all- digital rotating platform system is designed. This unit enhances its synchronization with platform, focusing and light intensity control system. The ideas such as digital phase-locked integration, program- mable PID control and variable cycle speed stabilizing criterion etc, are proposed and applied to the design of the control of rotating platform system. With the help of advanced rapid light intensity modulation system, the PLDWs has the capability of manufacturing accurate ring, arbitrary arc and variable line width.
出处
《光电工程》
CAS
CSCD
北大核心
2004年第5期1-3,10,共4页
Opto-Electronic Engineering
基金
国家863高技术项目资助
关键词
激光直写
转台系统
微光学
Laser direct writing
Rotating platform system
Micro-optics