不同沉积粒子对非晶碳氢薄膜性质影响的分子动力学研究

A Molecular Dynamics Simulation Study of the Influence of Different Deposited Particle on the Properties of Hydrogenated Amorphous Carbon Films

非晶碳氢薄膜(a-C:H film)是一类具有亚稳态非晶结构的薄膜材料,具有许多优异特性,如极好的力学性能、光学透过性、生物相容性、极低真空摩擦系数等。文章介绍了不同沉积粒子在不同入射能量及角度的情况下,对非晶碳氢薄膜C、H原子含量、沉积率,薄膜粗糙度和sp3键组态的碳含量的影响。

Hydrogenated amorphous carbon film (a-C:H film) is one kind of materials with metastable amor- phous structure. Hydrogenated amorphous carbon films have lots of unique properties, such as good mechanical properties, optical transmissibility, biocompatibility, and low friction coefficient. In this article, it introduces the effect of the content of C, H atoms and C-sp3, deposition rate, and roughness on hydrogenated amorphous carbon films by different incident angles and energy of particle.