微热管复合沟槽激光刻蚀工艺正交优化试验

Orthogonal Optimization Test of Laser Etching Process for Micro Heat Pipe Composite Grooves

针对传统加工方式的不足,提出使用激光刻蚀微热管复合沟槽的方法。基于正交试验方法优化复合沟槽激光刻蚀工艺参数组合,通过极差分析法绘制了各试验因素与各试验指标之间的关系曲线图,得到各试验因素对刻蚀效果的影响程度,并以此为基础优化激光工艺参数,进行微热管复合沟槽激光刻蚀工艺优化研究。试验结果表明:各试验因素对最大毛细压力的影响大小顺序依次为激光重复频率、平均功率、扫描速度、扫描次数。采用优化后的工艺参数进行试验研究,当激光平均功率为20W,重复频率为40kHz,扫描速度为150mm/s,扫描次数为25次时,微热管复合沟槽为液体工质循环提供的最大毛细压力较优,为157282×σPa。

In order to overcome the shortcomings of the traditional processing methods, a method of laser etching for micro heat pipe composite grooves is proposed. Combination of laser etching parameters was optimized based on orthogonal test in this paper. The relationship graph between the experimental factors and the experimental indexes was plotted by using the range analysis method, and the degree of influence of various factors on laser etching quality was obtained. As a basis, laser etching parameters were optimized and laser etching experiment was taken on composite grooves using optimized parameters. The test results showed that the sequence of the factors affecting on maximum capillary pressure was laser repetition frequency, average power, scanning speed, scanning times. By using optimized parameters, when laser average power was 20W, repetition frequency was 40kHz, scanning speed was 150mm/s, scanning times was 25, the micro heat pipe composite grooves provided a maximum capillary pressure of 157282×σPa for liquid circulation.ers Paramete.