多弧离子镀TiN、TiAlN膜层性能的研究

Study on Properties of TiN and TiAlN Film Deposited by Multi-arc Ion Plating Method

采用多弧离子镀技术,在20CrMnSi钢基体上沉积了TiN、TiAlN膜层。使用球坑仪、显微硬度计、划痕仪、磨损实验机和盐雾箱对膜层的厚度、显微硬度、结合力、磨损性能和耐盐雾腐蚀性能进行检测。结果表明:随膜层厚度的增大,两种膜层的硬度和耐盐雾腐蚀性升高,结合力降低,耐磨性先升高后降低,且在膜层厚度为9μm时耐磨性最高。二者相比,TiAlN膜层优于TiN膜层。

TiN and TiAlN films were deposited on 20 CrMnSi steel matrix by multi-arc ion plating technology.The thickness,microhardness,adhesion strength,wear properties and salt spray corrosion resistance of the films were checked up by ball cratering,microhardness tester,scratch tester,friction wear tester and salt spray atmosphere tester.The results show that with the increase of the thickness of the films,the microhardness and salt spray corrosion resistance of the two films improve,the adhesion strengths decrease;the wear properties firstly increase and then decrease.When the thickness of the films increase to 9μm,the wear properties of the films are best.