摘要
The excimer laser has important applications in many fields. Because of its non-uniform intensity distribution there are some limits in applications. This paper introduces rotational lens array to improve intensity distributions. The intensity variation is reduced to 1 percent by computer simulation.
The excimer laser has important applications in many fields. Because of its non-uniform intensity distribution there are some limits in applications. This paper introduces rotational lens array to improve intensity distributions. The intensity variation is reduced to 1 percent by computer simulation.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2003年第S1期869-870,共2页
Acta Optica Sinica
