摘要
回顾了位置敏感传感器(PSD)的发展历史,介绍了各种光敏面结构的PSD。并结合研究成果,阐述了单晶硅、氢化非晶硅、有机材料、大面积挠性薄膜、CMOS型,一维及二维阵列PSD等采用各种组成材料和工艺制作的PSD的发展现状,并对今后的发展和研究方向进行了展望。
Position sensitive detectors are continuous optical sensors utilizing the lateral photovoltaic effect to produce an electrical output that varies linearly with light spot position whose research history is briefly introduced. While PSDs are used in more and more fields, the cheaper PSD with larger sensitive area and faster response speed are needed and at the same time, flexible, organic and CMOS-based PSD and 1D and 2D PSD arrays are developed to meet the specific request of position sensitive detecting. Recent advances in these aspects are summarized in this paper.
出处
《光学仪器》
2004年第4期68-71,共4页
Optical Instruments
