工作波长短于10nm的软X射线多层膜

Soft X-Ray Multilayers at Wavelengths below 10nm

本文对工作波长短于１０ｎｍ的软Ｘ射线多层膜正入射反射镜的国内外现状作了简单的介绍和分析，给出选择多层膜材料的一些原则，并结合本组情况选择了Ｒｕ／Ｂ４Ｃ、Ｒｈ／Ｂ４Ｃ和ＭＯ／Ｂ４Ｃ三种材料组，在波长８．０ｎｍ附近设计并计算出多层膜的结构和反射率等性能参数。

This paper introduces the soft X--ray multilayers at wavelengths below 10um andsummaries some rules of selecting the multilayer meterials. We design the Ru/B4C.Rh/B4Cand Mo/B4C multilayers for sum wavelength at normal incidence, and give the idealreflectivities of 38%--50%. The effect of thickness control error as well surface--interfaceroughness is also discussed. These will be use fill in next research of fabrication procedure.