摘要
In this paper, the transparent hard diamond-like carbon (DLC) films were deposited on glass substrate by magnetic confined radio-frequency plasma chemical vapor deposition. The structure of films was studied by Raman spectra and X-ray photoelectron spectra (XPS), the transmittance of films by Spectrophotometer. The mechanism of the influence of films structure on transmittance of the films was discussed. The results show that the thickness of films was lower than 100nm, and the transmittance was over 90% in 380-780 nm region. Discussion in theory on the influence of film structure on transmittance was correspondence to experiment results.
In this paper, the transparent hard diamond-like carbon （DLC） films were deposited on glass substrate by magnetic confined radio-frequency plasma chemical vapor deposition. The structure of films was studied by Raman spectra and X-ray photoelectron spectra （XPS）, the transmittance of films by Spectrophotometer. The mechanism of the influence of films structure on transmittance of the films was discussed. The results show that the thickness of films was lower than 100nm, and the transmittance was over 90% in 380780 nm region. Discussion in theory on the influence of film structure on transmittance was correspondence to experiment results.
出处
《广东有色金属学报》
2005年第2期502-506,共5页
Journal of Guangdong Non-Ferrous Metals
关键词
碳
薄膜
结构参数
人工合成
diamond-like carbon films
radio-frequency plasma chemical vapor deposition
structure of the films
transmittance
