摘要
基于气体聚集(GA)形成团簇的过程,利用双束蒸发共沉积方法,在室温下成功地制备了Fe-Cu纳米磁性包埋团簇样品。对样品的TEM/ED分析表明,平均直径为20nm左右的Fe团簇被Cu原子所包裹,形成了以Fe团簇为芯,Cu原子为壳的良好的芯-壳式包埋结构。
Based on Gas-Aggregation (GA) process, nanometer size Fe-Cu embedded clusters are produced by bi-beam co-evaporation method at room temperature. TEM/ED investigation shows that Fe clusters about 20urn in diameter are embedded in Cu matrix, and the core--shell structure with Fe cluster being the core and Cu atoms being the shell is well formed in so-prepared specimens.
出处
《微细加工技术》
1996年第1期40-43,共4页
Microfabrication Technology
基金
中国博士后科学基金
国家自然科学基金