期刊文献+

Effect of ultrasonic power and bonding force on the bonding strength of copper ball bonds 被引量:1

Effect of ultrasonic power and bonding force on the bonding strength of copper ball bonds
下载PDF
导出
摘要 Copper wire, serving as a cost-saving alternative to gold wire, has been used in many high-end thermosonic ball bonding applications. In this paper, the bond shear force, bond shear strength, and the ball bond diameter are adopted to evaluate the bonding quality. It is concluded that the ef/~cient ultrasonic power is needed to soften the ball to form the copper bonds with high bonding strength. However, excessive ultrasonic power would serve as a fatigue loading to weaken the bonding. Excessive or less bonding force would cause cratering in the silicon. Copper wire, serving as a cost-saving alternative to gold wire, has been used in many high-end thermosonic ball bonding applications. In this paper, the bond shear force, bond shear strength, and the ball bond diameter are adopted to evaluate the bonding quality. It is concluded that the ef/~cient ultrasonic power is needed to soften the ball to form the copper bonds with high bonding strength. However, excessive ultrasonic power would serve as a fatigue loading to weaken the bonding. Excessive or less bonding force would cause cratering in the silicon.
出处 《China Welding》 EI CAS 2007年第3期46-50,共5页 中国焊接(英文版)
关键词 copper wire bond thermosonic bonding ultrasonic power bonding force shear force copper wire bond, thermosonic bonding, ultrasonic power, bonding force, shear force
  • 相关文献

参考文献9

  • 1C. W. Tan,A. R. Daud.Bond pad cratering study by reliability tests[J].Journal of Materials Science: Materials in Electronics.2002(5)
  • 2Schwizer J,Mayer M,Bolliger D, et al.Thermosonic ball bonding: friction model based on integrated microsensor measurements[].The th IEEE/CPMTInternational Electron- ic Manufacturing Technology Symposium IEMT.1999
  • 3Harman G G,Johnson C E.Wire bonding to advanced copper, low-K integrated circuits, the metal/dielectric stacks, and material considerations[].IEEE Transactions on Components and Packaging Technology.2002
  • 4Murali S,Srikanth N,Charles J V.Grains, deformation sub- structures, and slip bands observed in thermosonic copper ball bonding[].Materials Characterization.2003
  • 5Charles HK,Mach K J,Lehtonen S J, et al.Wire bonding at higher ultrasonic frequencies: reliability and process impli- cations[].Microelectronics Reliability.2003
  • 6Ainouz L,Muller F AG.The use of copper wire as an alter- native interconnection material in advanced semiconductor packaging[].wwwknscom.
  • 7Toyozawa K,Fujita K,Minamida S, et al.Development of copper wire bonding application technology[].Electronic Com- ponents &Technology Conference.1990
  • 8Hyoung-Joon Kim.Effects of Cu/Al Intermaetallic Compound (IMC) on Copper Wire and Aluminum Pad Bondability[].Transaction on Components and Packaging Technologies.2003
  • 9C. W. Tan,,A. R. Daud.Bond Pad Cratering Study by Reliability Tests[].Journal of Materials Science Materials in Electronics.2002

同被引文献7

引证文献1

二级引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部