摘要
提出一种用于检测微位移的新型电涡流传感器。该传感器中,两层微平面线圈叠加在坡莫合金铁芯上,分别作为驱动元件与敏感元件。详细给出了微平面线圈的SU-8胶UV-LIGA工艺与磁性铁芯的电铸成形工艺。当激励电流为50kHz的正弦交流信号,而且检测Ni-Fe片与铁芯间隙为10μm时,敏感线圈的输出电压达30mV,并且间隙值在50μm范围内与输出电压接近为线性关系。传感器尺寸为5mm×1.6mm,易于集成,能实现对微位移的检测。
An analytical model of an eddy current sensor designed for noncontact distance measurement was presented. The device consisted of two planar coils （driver coil and pickup coil） stacked on the magnetic core. The planar coil fabricated by UV-LIGA technology with SU-8 photoresist was illustrated, and the permalloy magnetic core electroforming process was also presented. Tested with 50kHz sinusoidal signal, the output voltage on the sensing coil rearches 30mv with an Ni-Fe target placed at a distance of 10μm, and the experimental result shows a linear relation between the distance and output voltage. The whole size of the device is. φSmm× 1.6mm. The results demonstrate that the device can evaluate the distance nondestructively and be easily integrated on chip.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2007年第18期2156-2159,共4页
China Mechanical Engineering
基金
国家自然科学基金资助项目(50375073)
