摘要
采用严格耦合波理论(RCWA)和多层近似法,详细的推导了任意面形介质光栅的衍射问题,得出了其矩阵求解方程,并采用增强透射矩阵法来避免直接求解带来的数值不稳定,提高了计算效率。使用该方法对梯形光栅进行了数值计算,结果表明采用严格耦合波理论和多层近似法,可以方便、有效地求解任意面形介质光栅的衍射效率问题,计算中光栅在不同参数下衍射效率的总和严格等于1,且未有数值不稳定性问题。
An enhanced, numerically stable transmittance matrix approach is developed and is applied to the implementation of the rigorous coupled-wave analysis and muhilayer approximation for any shape profile gratings. The enhanced approach is shown to produce numerically stable results for excessively muhilayer approximation. The method is used to numerical calculation of file trapeziform gating. The results had shown using this method can calculate the diffraction efficiency of any shape profile grating conveniently and availability. In this calculation the sum of diffraction efficiency amount to one in different parameter,and doesn＇ t - appear numerical instability.
出处
《激光杂志》
CAS
CSCD
北大核心
2007年第4期26-27,共2页
Laser Journal
基金
重庆市教育委员会科学技术研究项目资助(KJ071205)。
关键词
任意面形介质光栅
衍射特性
严格耦合波理论
多层近似法
梯形光栅
any shape dielectric profile gatings
diffractions characteristics
RCWA
multilayer approximation
trapeziform gating
