纳米校准与测试——基于纳米测量机的试验性研究

Nanometer Metrology and Measurement——Trails Based on Nanomeasuring Machine

主要介绍了基于纳米测量机的高阶梯差台阶标准样板和深沟槽深度标准样板计量测试和校准工作研究,包括在NMM上对两种标准样板进行计量测试和校准、在NMM上安装不同的探测传感器时纳米级深度标准样板和台阶高度样板的校准比较、以及在研航空基金项目"在NMM上实现小型非球面的坐标扫描轮廓测量方法"。

This paper mainly introduces the metrology, measurement and calibration research work of the step standard template with high step difference and the depth standard template with windrow groove based on the nano-measuring machine （NMM） . Those include doing metrology, measurement and calibration of the two templates on the NMM, the calibration comparison of the nano-class depth standard template and depth height standard template when the different sensors are installed on the NMM and ＂To Realiye the Measuring Methad of the Coordinate Profile Scanning for Small Aspherical Surface on the NMM＂ as an ongoing Aviation Foundation project.