洁净室亚微米颗粒污染的模型模拟研究

Modeling of Contamination of Sub-micrometer Particulates in Clean Room

采用基于欧拉框架下的Small Slip Model颗粒拟流体模型和Three Layer Model壁面沉积边界条件,并运用标准的k-ε湍流模型和壁面函数方法对非单向流洁净室内亚微米颗粒污染物的输运和分布结构进行数值模拟。模拟结果和实验结果具有较好的一致性,说明所采用的计算模型和方法具有良好的合理性和适用性。洁净室内颗粒污染物的输运和分布特征受空气流场的制约,尤其是室内存在的回流区和旋涡区,对污染控制和排除效率有着重要的影响。此外,颗粒的湍流扩散作用在对流作用较弱的区域发挥着重要的作用,对其机理的正确认识和分析有助于提高模型研究的准确性。

Small slip pseudo-fluid particle model and semi-empirical three layer deposition particle boundary condition, combined with standard k-ε turbulence model plus wall function were used to examine contamination of sub-micrometer particulates in non-unidirectional flow clean room. Good agreement between numerical results and experimental observation were achieved, which validated the applicability and reasonableness of the model and method adopted. Transport and distribution of particulate contaminant in clean room were subject to airflow pattern, particularly in recirculation and swirling zones, which affected pollution control and removal efficiency significantly. Particle eddy diffusion played an important role in areas where convection was not dominant, and underlying mechanism can be conductive to improving accuracy of numerical modeling.