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Characterization and Application of Diamond-like Carbon Films

Characterization and Application of Diamond like Carbon Films
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摘要 Diamond like carbon films were synthesized by the pulsed laser deposition method under a magnetic filed. The magnetic field was used to enhance the hardness of the films. Analysis with transmission electron microscopy and atomic force microscopy were carried out to characterize the films. As a protective coating, the film was deposited on porous silicon. The influence of the coating on the photoluminescence properties of porous silicon was studied. Diamond like carbon films were synthesized by the pulsed laser deposition method under a magnetic filed. The magnetic field was used to enhance the hardness of the films. Analysis with transmission electron microscopy and atomic force microscopy were carried out to characterize the films. As a protective coating, the film was deposited on porous silicon. The influence of the coating on the photoluminescence properties of porous silicon was studied.
出处 《Rare Metals》 SCIE EI CAS CSCD 1998年第3期48-53,共6页 稀有金属(英文版)
关键词 Diamond like carbon films TEM AFM porous silicon PHOTOLUMINESCENCE Diamond like carbon films, TEM, AFM, porous silicon, Photoluminescence
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