碳氟等离子体改性PET表面的反应机制的研究

An Investigation of the Surface Modification Mechanism on PET by Fluorocarbon Plasmas

利用ＣＦ４与ＣＨ４／ＣＦ４等离子体来处理涤沦膜（ＰＥＴ），讨论了不同摩尔比的碳氟等离子体改性ＰＥＴ表面的作用机制．利用变角Ｘ光电子能谱（ＸＰＳ）和接触角测试技术研究了改性后ＰＥＴ表面的结构和性质．结果表明，碳氟等离子体的处理可以显著地改善ＰＥＴ表面的憎水性．不同摩尔比的碳氟混合气体的作用机制不同，其中碳氟混合气体等离子体以聚合为主，在ＰＥＴ表面形成均匀的改性层；而纯ＣＦ４气体则以刻蚀为主，含氟基团主要分布在ＰＥＴ表面．

Poly(ethyl terephthalate)(PET) surfaces were modified by CF 4 and CH 4/CF 4 plasmas in this paper. The angle dependent X ray photoelectron spectroscopy(XPS) technique was employed to determine the changes of surface structures and properties of the modified PET. The surface modification mechanisms on PET by the fluorocarbon plasmas at different molar ratios were detailed discussed. Experimental results show that hydrophobic characteristic of the modified PET surface can be improved by fluorocarbon plasmas singnificantly. CH 4/CF 4 mixture plasma is polymerization predominated, and the homogeneity along depth of surface layers can be intuitively observed. On the other hand, pure CF 4 plasma is etching prodominated, and the fluorine containing groups distributes on the modified PET surface.