基于ITO玻璃-PDMS复合式低电压电泳芯片的快速制备

Rapid Fabrication of Low-voltage Electrophoresis Chip Based on ITO Glass and PDMS

提出了一种基于ITO玻璃-PDMS复合式低电压电泳芯片的快速制备新方法.该方法采用Protel软件绘制低电压电泳芯片沟道的形状,利用电路板加工技术加工沟道模具,并采用PDMS整体浇注方法制备芯片微沟道;采用光刻、湿法刻蚀等微加工技术方法对ITO导电玻璃进行加工,并制备出ITO阵列电极.最后经修饰、封装等工序得到基于ITO玻璃-PDMS复合式低电压电泳芯片.实验表明:采用该方法制备的ITO阵列电极线条清晰,沟道侧壁陡直、表面光滑.同时,采用该方法制备芯片周期短,不需要昂贵的制作设备.

A new method of rapidly fabricating low-voltage electrophoresis chip based on ITO glass and PDMS is presented.The channel mould of low-voltage electrophoresis chip is designed by Protel software,and a circuit board mould is shaped by using the circuit board processing technology.The PDMS micro-channels of this chip are formed by using the PDMS monolithic pouring technology.The ITO electrode array is fabricated by using the lithography,wetting etching,and other processing technology.Finally,the low-voltage electrophoresis chip based on ITO glass and PDMS is composited by the processing course,such as modified,packaging processes,and other processing technology.The experiment results show that low-voltage electrophoresis chip has the high performance,such as the clear lines shape of ITO electrode,the steep channel wall,and the smooth surface.The fabrication period of chip is short,and no expensive equipment is needed to fabricate the microchip.