摘要
设计并制作了一种聚合物2×2定向耦合型电光开关.针对溶胶-凝胶法合成的有机/无机杂化电光材料膜厚较薄的情况,采用一种加载条形波导结构,利用掺有环氧丙脂的聚甲基丙烯酸甲脂-甲基丙烯酸缩水甘油脂作为引导层,在电光薄膜上构成定向耦合器,通过紫外光刻、反应离子刻蚀、电晕极化等工艺,制备了聚合物定向耦合型电光开关,并采用共面波导行波电极以电推挽方式工作.经测试,其器件损耗约为16dB,开关电压9V.
The design and fabrication of a directional coupler electro-optic switches. A strip-loading optical waveguide is proposed which uses organic/inorganic hybrid EO material, synthesized by sol/gel technique, as the active layer. Polymethyl-methacylate-glyciclyl-methacrylate(PMMA/GMA) with index regulator bis-A-epoxy, acting as the guiding waveguide, forms the coupler configuration. The device is fabricated by Corona poling, UV lithography and reactive ion etching method (RIE) process. A co-planar waveguide(CPW) electrode is adopted and the switches is working in electric push-pull way. The test results show that the device loss is about 16dB, and a switching voltage of 9V is observed.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2009年第12期3084-3087,共4页
Acta Photonica Sinica
基金
国家重点基础研究发展规划(2006CB302803)资助
关键词
聚合物
电光开关
定向耦合
有机/无机杂化
Polymer
Directional coupling
Electro-optic switches
Hybrid material