直线式时栅传感器的自动定位闭环控制系统设计

Design of Automatic Positioning Close-Loop Control System for Time Grating Line Sensor

为了实现直线式时栅传感器数据的快速采样,提高测试效率,设计了一套高精度自动定位系统。该系统采用ARM作为主控芯片,控制步进电机驱动滚珠丝杠,带动直线式时栅传感器的动测头与直线光栅的扫描头同步运动,同时接收直线式时栅传感器的反馈信号,形成高精度闭环控制,并与上位机之间进行串口通信。系统定位精度达到0.1μm。

In order to achieve fast sampling of the time grating line sensor and improve measuring efficiency,a high-precise automatic positioning system for data sample of the time grating line sensor is designed. ARM is used as a major controlling chip to control step motor to drive ball screw,and bring the dynamic measuring head of the sensor and scan head of line grating synchronized moving,while receiving the feedback signal from the sensor,forming a high-precision closed loop control system,and communicating with upper computer by serial. The positioning precision of this system can come up to 0.1μm.