涤纶膜(PET)表面的氟化处理及其结构的XPS研究

An Investigation of the Fluorination of PET Surface and Structures of PET Treated by Fluorocarbon Plasma

详细描述了用CF4／CH4混合气体等离子体处理涤纶膜（PET）表面的过程。利用X光电子能谱（XPS）研究处理后PET的表面结构、性质以及处理后样品的浸水行为。结果表明，PET经碳氟等离子体处理后，其表面覆盖上一层具有憎水功能的氟化层，氟化层的结构与碳氟混合气体的组成有关；混合气体等离子体在PET表面形成化学组成均匀、交联结构的处理层；纯CF4等离子体的处理结果则以刻蚀作用为主，处理层的化学组成不均匀，含氟基团主要分布在外表面。处理后的样品浸水实验证明了混合气体的处理层更有利于保持憎水特性。

The surface modification of PET by CF4/CH4 plasmas was described in detail. XPS technique was employed to study the surfacestructure, properties and the dynamic behaviors immersed into water of the modified PET. It was found that the structures of the modifiedlayers on PET surface depended on the molar ratio of CF4/CH4 feed, and the homogeneous, cross-linking polymerized films could be generated by using CH4/CF4plasmas, but not using the pure CF4 Plasma, and the fluoribecontaining groups appeared on the surface of PET.The immersing experiments of the modified PET prove that the modified layer by CF4/CH4 mixture plasmas shoW the strong hydrophobicity than that of CF4 alone.