Scanning near-field acoustic microscope and its application
Scanning near-field acoustic microscope and its application
摘要
Scanning near-field acoustic microscope （SNAM） combines the ultrasonic detection technology with scanning near-field microscopy. The main characteristic of such microscope is that the acoustic wave is produced or detected in near-field area whether ultrasonic transducer acts as generator or detector. The resolution of SNAM can reach to nanometer scale. First, two typical SNAMs, scanning electron acoustic Inicroscope and scanning probe acoustic microscope, will be introduced in this paper. The working principle of our homemade SNAM based on a commercial scanning probe microscope will be reported, together with some recent results from this homemade SNAM.
基金
supported by the National Natural Science Foundation of China (Grant Nos.50971011 and 10874006)
Beijing Natural Science Foundation (Grant No.1102025)
Research Fund for the Doctoral Program of Higher Education of China (Grant No.20091102110038)
参考文献13
-
1徐平,蔡微,余威,钱建强,姚骏恩.扫描近场声显微镜用于光盘表面薄膜结构的研究[J].电子显微学报,2006,25(4):313-315. 被引量：2
-
2殷庆瑞,曾华荣,杨阳,惠森兴,徐政魁.电声显微成像和应用[J].电子显微学报,2003,22(4):338-343. 被引量：3
-
3Banerjee S,Gayathri N,Shannigrahi S R, et al.Imaging distribution of local stiffness over surfaces using atomic force acoustic micros- copy. Journal of Physics D Applied Physics . 2007
-
4Kazushi Y,Hisato O,Oleg K.Ultrasonic force microscopy for nano- meter resolution subsurface imaging. Applied Physics Letters . 1994
-
5Hurley D C,Turner J A.Humidity effects on the determination of elastic properties by atomic force acoustic microscopy. Journal of Applied Physics . 2004
-
6Keiji T,Tsuyoshi H,Sumio H, et al.Tunneling acoustic microscope. Applied Physics Letters . 1989
-
7Strozewski K J,Mcbride S E,Wetsel G C.High-frequency sur- face-displacement detection using an STM as a mixer-demodulator. Ultramicroscopy(PartA) . 1992
-
8Liu X X,Abicht H P,Balk L J.Acoustic and thermal near-field study on ferroelectric BaTiO3 ceramics. Ferroelectrics . 2002
-
9K.Yamanaka,Y.Maruyama,T Tsuji,andK.Nakamoto.Resonance frequency andQ factor mapping by ultrasonic atomic force microscopy. Applied Physics Letters . 2001
-
10Hurley D C,Shen K,Jennett N M,Turner J A.Atomic force acoustic microscopy methods to determine thin-film elastic properties. Journal of Applied Physics . 2003
二级参考文献10
-
1张亦奕,贺节,商广义,姚骏恩.原子力显微术[J].电子显微学报,1995,14(2):142-146. 被引量：8
-
2殷庆瑞,唐振,张惠静,江福民,王通,王惠芳,丁积祥,梁坚,韦建勇,朱祖福.扫描电—声显微镜及其应用[J].电子显微学报,1990,9(4):53-61. 被引量：6
-
3Cretin B,Sthal F.Scanning microdeformation microscopy[J].Appl Phys Lett,1993,62 (8):829-831.
-
4Yin Q R,Zeng H R,Li G R,et al.Near-field acoustic microscopy of ferroelectrics and related materials[ J ].Materials Science and Engineering B,2003,99:2-5.
-
5Rabe U,Arnold W.Acoustic microscopy by atomic force microscopy[J].Appl Phys Lett,1994,64 (12):1493 -1495.
-
6Rabe U,Janser K,Arnold W.Vibrations of free and surface-coupled atomic force microscope cantilevers:Theory and experiment[J].Rev Sci Instrum,1996,67(9):3281 -3293.
-
7Yamanaka K,Ogiso H,Kolosov O.Ultrasonic force microscopy for nanometer resolution subsurface imaging[J].Appl Phys Lett,1994,64(2):178-180.
-
8Hurley D C,Shen K,Jennett N.M,et al.Atomic force acoustic microscopy methods to determine thin-film elastic properties[ J ].Journal of Applied Physics,2003,94 (4):2347-2354.
-
9Mironov V L.Fundamentals of Scanning Probe Microscopy[M].Nizhniy Novgorod:The Russian Academy of Sciences Institute of Physics of Microstructures,2004.
-
10杨阳,惠森兴,张冰阳,姚烈,殷庆瑞.扫描电声显微镜图像质量的提高[J].电子显微学报,1998,17(1):92-96. 被引量：2
共引文献3
-
1占左玲,刘世国,蔡微,徐平.扫描探针声显微镜原理及其应用[J].电子显微学报,2008,27(2):167-171. 被引量：3
-
2田青超,陈家光.材料电子显微分析与应用[J].理化检验（物理分册）,2010,46(1):21-25. 被引量：8
-
3方岱宁,裴永茂.电磁功能材料的多场耦合实验研究进展[J].力学与实践,2010,32(6):1-7.
-
1殷庆瑞,唐振,张惠静,江福民,王通,王惠芳,丁积祥,梁坚,韦建勇,朱祖福.扫描电—声显微镜及其应用[J].电子显微学报,1990,9(4):53-61. 被引量：6
-
2周志清.激光扫描声显微镜物理系统的设计及实验[J].声学学报,1990,15(4):292-298.
-
3用近场显微镜观测纳米材料的成分[J].光机电信息,2002,19(10):42-42.
-
4傅恩生.在纳米线中观察到紫外/蓝色激光[J].激光与光电子学进展,2003,40(6):63-63.
-
5陈戈林,胡思正,罗淑云,申忠明,张克远,张克潜.微机化声显微镜及其在材料科学研究中的应用[J].无机材料学报,1991,6(2):135-143. 被引量：1
-
6王群,李交美,周志清.激光扫描声显微镜中光扫描电路的设计[J].应用激光,1992,12(5):210-212.
-
7汪学方,张鸿海,王生,徐龙.使用微晶振的扫描近场声显微镜研究[J].武汉汽车工业大学学报,2000,22(1):34-37. 被引量：1
-
8臧友松,王连杰.激光扫描光声微探针应用研究[J].四川激光,1982,3(2):13-17. 被引量：1
-
9牛付林.超声波检测技术在保证电子元器件质量中的应用[J].电子质量,2003(9). 被引量：7
-
10朱琳.扫描电子显微镜及其在材料科学中的应用[J].吉林化工学院学报,2007,24(2):81-84. 被引量：45
