摘要
本文通过对电子散斑小振幅振动测量的线性分析，实施一系列特殊算法、散斑平均技术及特殊图象处理等工作，使得纳米振动测量系统的测量精度得到较大提高．该系统将具有全场、非接触、测量速度快、测量精度高等优点。
A novel measurement system for nanometer vibration measurement is presented in this
paper The system can not only measure the amplitude of the vibration,but also can calculate out
the phase of the nanometer vibration The resolution of amplitude is about 0 5 nanometer The
system has the advantages of high accuracy,high speed and price
出处
《光子学报》
EI
CAS
CSCD
1999年第8期715-717,共3页
Acta Photonica Sinica
关键词
纳米振动
激光散斑
振动测量
Nanometer
vibration measurement
Electronic speckle pattern interferometry(ESPI)
