紫外-可见宽光谱显微成像光学系统的设计

Optical design of microscopic imaging system for ultraviolet-visible wide spectrum

介绍一个紫外-可见宽光谱显微物镜的设计过程。通过改进的PW法求解初始结构参数,确定采用两个分离的正负透镜组组成透射式光学系统,根据光学材料的色散特性,选取正透镜材料为CaF2,负透镜材料为熔石英,通过建立复消色差方程组来分配双分离透镜的光焦度,合理地对两组透镜的偏角进行分配。运用CODE-V光学设计软件对系统进行优化,使系统的位置色差和二级光谱同时得到校正,实现了复消色差。仿真结果表明:系统在整个视场范围内,点列图弥散圆RMS半径值小于5,最大视场处的像散为0.058,畸变为0.04%。

Design of a wide spectrum ultraviolet-visible microscope objective was introduced.According to the dispersive properties of ultraviolet（UV）optical materials,was selected as positive lens material,apochromatic equations for distributing the optical power of each lens in double-dialyte lens were established,and appropriate deviation angles were assigned for two groups.Based on theoretical calculation with PW method and optimization with CODE-V,the longitudinal chromatic aberration and secondary spectrum were corrected,and apochromatism was achieved.Simulation results show that the radius RMS of spot diagram dispersion circle is less than 5 in the entire field of view,astigmatism is 0.058 and istortion is 0.04% at the maximum field of view for this system.