摘要
扫描探针显微镜(SPM)具有高精度成像、纳米操纵等功能,是纳米科技、生命科学、材料科学和微电子等科学研究的重要工具.随着科学技术的发展,科学家和工程师们对科研工具SPM的性能也提出越来越高的要求.SPM控制技术作为提高SPM性能的关键技术之一,已经得到广泛的关注和研究.本文首先介绍SPM系统以及两种常用的SPM,讨论SPM扫描器(即压电驱动器)的特性及其数学模型;然后详细总结了SPM水平方向和竖直方向的控制技术,并且对扫描探针显微镜多输入多输出(SPM MIMO)控制技术进行了探讨;最后总结了SPM控制技术研究现状及其所面临的问题.
Because of its high resolution imaging and nano-manipulation abilities, scanning probe microscope（SPM） is an important tool for the experimental investigation and manipulation in nanotechnology, including life science, material science, microelectronic, etc. With the development of science and technology, higher demands are proposed on SPM per- formances. As one of key technology to improve SPM performances, SPM control technology has received considerabie i attentions and investigations. At first, SPM system and two most commonly used SPM＇s are introduced; characteristics of SPM scanner（piezo-actuator） and its mathematic model are discussed. Secondly, existing SPM level scanning control tech- nologies and vertical positioning control technologies are summarized; and SPM MIMO（multiple-input multiple-output） control technology is explored. Finally, current SPM control technology research and existing questions are discussed.
出处
《控制理论与应用》
EI
CAS
CSCD
北大核心
2011年第3期285-293,共9页
Control Theory & Applications
基金
国家自然科学基金重点资助项目(60972107)
