摘要
A Maxwellian electron energy distribution function （EEDF） is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases, non-Maxwellian EEDFs can be formed due to the non-local electron heating or the inelastic-collisional energy loss processes. In this work, with a collisional-radiative model, we propose an approach to obtain the non-Maxwellian EEDF with a ＇two-temperature structure＇ from the emission line-ratios of Paschen 2p levels of argon and kryp- ton atoms. For applications of this approach in reactive gas （CF4, O2, etc） discharges that contain argon and krypton, recommendations of some specific emission line-ratios are provided, according to their sensitivities to the EEDF variation. The kinetic processes of the relevant excited atoms are also discussed in detail.
A Maxwellian electron energy distribution function （EEDF） is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases, non-Maxwellian EEDFs can be formed due to the non-local electron heating or the inelastic-collisional energy loss processes. In this work, with a collisional-radiative model, we propose an approach to obtain the non-Maxwellian EEDF with a ＇two-temperature structure＇ from the emission line-ratios of Paschen 2p levels of argon and kryp- ton atoms. For applications of this approach in reactive gas （CF4, O2, etc） discharges that contain argon and krypton, recommendations of some specific emission line-ratios are provided, according to their sensitivities to the EEDF variation. The kinetic processes of the relevant excited atoms are also discussed in detail.
基金
supported by National Natural Science Foundation of China （Nos. 11075093 and 10935006） and the China Postdoctoral Science Foundation （No. 20100480327）
