摘要
棱镜机构是实现对位的关键部件.为提高对位精度,在棱镜的棱脊倾斜和偏转状态下,应用动态光学理论推导出反射光线实际出射方向与理想出射方向的角度偏差以及实际图像与理想图像相对位置偏差的计算公式.提出了利用高精度、高速度的数字测微计和显微视觉系统分别实现棱脊倾角和偏转角的两步检测与调整的方法.通过实验和误差分析,验证了上述计算和调整方法的有效性.
Prism mechanism is critical part to achieve alignment. To improve the accuracy of alignment, with tilt and deflection of prism base-edge, dynamic optical theory was used to derive the calculation formulas of angle deviation between actual and ideal emergent ray directions of reflected ray as well as the relative position deviation between actual and ideal images. A two-step method to detect and adjust the tilt angle and deflection angle of prism base-edge respectively by using high-precision, high-speed digital micrometers and micro-vision system was proposed. Experiments and error analysis were carried out. The result has verified the validity of aforementioned calculation and adjustment methods.
出处
《北京理工大学学报》
EI
CAS
CSCD
北大核心
2011年第8期896-900,共5页
Transactions of Beijing Institute of Technology
基金
国家部委基金资助项目(51318020309)
国家教育部高等学校学科创新引智计划项目(B08043)
关键词
微装配
精确对位
棱镜
误差分析
micro assembly
precise-alignment
prism
error analysis
