直线式时栅传感器的动态测量与数据处理

Dynamic measurement and data processing of the linear type time grating sensor

针对直线式时栅传感器的动态测量,提出了直线式时栅传感器的主要动态误差源。采用直线光栅尺,光栅测量值作为直线式时栅传感器空间位置测量的标准量,直线式时栅传感器的预测测量值与之进行比较,从而得到动态预测测量的误差值。对测量的误差值进行数据的预处理:数据的截断和采样、异常数据剔除,预处理后对误差值进行频谱分析,提取出幅值和相位,以便于用软件实现谐波修正,提高直线式时栅传感器的精度。

According to dynamic measurement of linear type time grating sensor. Linear grating ruler is used, optical grating measuring values is used as standard quantum of space position measuring of linear time grating sensor. The measured value and the prediction value are compared, the error value of dynamic prediction measurement is obtained. The measurement error is pretreated such as data truncation and sampling, abnormal data eliminating, and after pretreated, the error value is spectrum analyzed, the amplitude and phase are extracted, so as to use software to realize harmonic correction and improve the precision of the linear time gating sensors.