氢钝化对GaAs/SiO_2纳米颗粒镶嵌薄膜光学性质的影响

The influence of hydrogen passivation on the optical properties of GaAs nano-granular embedded in SiO_2 matrix

利用射频共溅射方法,在溅射气氛含氢与不含氢条件下,在石英玻璃和抛光硅片衬底上沉积GaAs/SiO2纳米颗粒镶嵌薄膜.实验结果表明,在气氛含氢条件下制备的薄膜的室温吸收光谱存在着较明显的激子肩,其荧光发射谱也有明显的增强.这些现象可归因于氢对GaAs纳米颗粒膜的钝化作用.

Films of GaAs nano-granular embedded in SiO_2 matrix have been prepared on substrates of quartz glass and silicon slices by radio frequency magnetron co-sputterring technique in the atmosphere with or without hydrogen.When the film was prepared with hydrogen,a clear exciton shoulder was observed in the absorption spectrum,and an obvious enhancement of photo luminescence was also obtained.These phenomena can be regarded as the contribution of passivation effect of hydrogen on GaAs nano-granular films.