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铀表面非平衡磁控溅射离子镀Ti基薄膜的组织结构与腐蚀性能 被引量:5

Microstructures and Corrosion Resistance of Ti-Based Films Deposited on Depleted Uranium
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摘要 金属铀的化学性质十分活泼,极易发生氧化腐蚀。本文采用磁过滤多弧离子镀在金属铀表面制备Ti过渡层,然后采用非平衡磁控溅射离子镀技术制备了Ti、TiN单层膜及Ti/TiN多层薄膜,以期改善基体的抗腐蚀性能。采用X射线衍射、极化曲线、盐雾腐蚀试验对镀层的结构、表面形貌、抗腐蚀性能进行了分析。结果表明,采用磁控溅射在金属铀表面制备一层Ti/TiN多层膜后,多层膜界面较清晰,大量的界面可终止柱状晶的生长,细化晶粒,提高镀层的致密性,有效地改善了基体的抗腐蚀性能。 The Ti-based protection coatings, including Ti, TiN, and Ti/TiN multi-layers, were deposited by unbal- anced magnetron sputtering ion plating on the depleted uranium substrate pre-deposited with Ti buffer layers grown by fil- ter cathode multi-arc plating. The microstructures and electrochemical properties of the Ti-based protection coatings were characterized with X-ray diffraction, scanning electron microscopy and electrochemical probes. The preliminary results show that the Ti/TiN multilayer outperforms the films of pure Ti and TiN in the enhancement of the surface corrosion re- sistance and surface oxidation resistance of the depleted uranium, possibly because the well-defined sharp interfaces of the Ti/TiN multilayer curb the growth of columnar grains and the spreading of cracks.
出处 《真空科学与技术学报》 EI CAS CSCD 北大核心 2012年第3期240-243,共4页 Chinese Journal of Vacuum Science and Technology
基金 中国工程物理研究发展基金项目(2009B0203019)
关键词 贫铀 非平衡磁控溅射多层膜腐蚀性能 Delepted uranium, Unbalanced magnetron sputtering, Multilayer film, Corrosion resistance
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