面向半导体设备的Interface A通信方法研究

Research on communication method of interface a for semiconductor equipment

针对半导体设备工厂自动化的设备数据采集需求,给出了一种基于Interface A标准的通信方法,该方法构造了设备的通用模型,设计了设备通信的安全认证和授权机制,并给出了采集设备实时数据的方法,可满足工厂自动化系统对半导体设备的数据采集和设备控制需求。

According to the requirement of equipment data acquisition of semiconductor manufacturing equipment in the factory automation,this paper present a communication solution based on SEMI Interface A standards.The method,constructing the common equipment model of semiconductor equipment,designing secure authentication and authorization mechanisms,and giving way to real-time data acquisition,would meet the requirement of equipment data acquisition and control for semiconductor equipment in the factory automation.