微波集成电路基片复介电常数快速宽频带测试技术

A Rapid and Broad-Band Technique for Measurement of Complex Permittivity ol MIC Substrates

本文提出了一种微波集成电路基片复介电常敛测试技术,其测试频率范围为1～20CHz,εJ的测试范围为2～25,tanδ的测试范围为3×10^(-4)～1×10^(-2),可以测试各种柔性和刚性的介质基片材料,则试ε′_r的不确定度优于±1％,tanδ的不确定度约为±10％。该测试技术实现了无损和自动化测量,测试电路简单,测试速度快,尤其适用于介质基片的批量和在线检测。

A technique is presented for the measurement of complex permittivity of MIC substrates. The test frequencies range from 1 to 20 GHz. This technique covers determination of εr' and tan5 of MIC substrates with εr' in the range from 2 to 25 and with tan5 in the range from 3×10-4 to 1 × 10-2. All kinds of flexible and rigid materials of MIC substrates can be measured. An uncertainty of εr' is less than ±1%, and that of tanδ is about ±10%. Nondestructive and automated measurements are made. The test circuit is simple, and the test speed is rapid. The technique is particularly suitable for industrial surveying of complex permittivity of MIC substrates.