摘要
本文综述了 AZO透明导电薄膜的结构特点 ,电学和光学的特性 ,薄膜研究、应用和开发现状 。
In this paper, the micro structural, electrical and optical properties of AZO transparent conducting films are described and the present AZO thin films development and applications are given. So far as we know the AZO thin films developing prospects are concluded.
出处
《真空》
CAS
北大核心
2000年第5期10-13,共4页
Vacuum