摘要
采用物理气相沉积（PVD） TiN涂层的表面处理技术,对合金结构钢进行表面强化处理.分析了不同本底真空度下TiN涂层的硬度、膜基结合力以及涂层颗粒尺寸等.结果表明,本底真空度在7.8×10-3～ 10.0×10-2 Pa范围内,本底真空度与涂层颗粒尺寸成反比,与硬度和膜基结合力成正比.当其为7.8×10-3 Pa时进行30-40 min沉积的涂层,涂层硬度可达到1 878.63 HVo.1,结合力达到7.86 N.
The alloy steel was processed surface strengthening treatment by the physical vapor deposi- tion technology （PVD）. It was analyzed the hardness, the film adhesion and particle size of TiN coating under different background vacuum in thig paper. The results show that the vacuum degree is inverse proportional to the particle size of coating and direct proportional to the hardness and adhesion in 7.8 ×10-3- 10.0 ×10-2 Pa range. When the 7.8 ×10-3 Pa,the hardness of TiN coating has up to 1 878.63 HV0. t and the binding force of coating is up to 7.86 N in the process of coating deposition at 30 -40 min.
出处
《江西科学》
2013年第6期797-799,共3页
Jiangxi Science
基金
江西省科学院国家预研项目(2011-YGY-02)
江西省科学院惠普项目(2013-XTPH2-22)
