摘要
为满足后顶焦度高精度测量需求,提出了一种基于激光差动共焦技术的后顶焦度测量方法,研制了一套测量系统。该系统将激光差动共焦技术的精密定焦性能应用于后顶焦度测量,显著地提高了定焦定位能力,利用干涉测长技术测量相应偏离距离,最终实现后顶焦度的精密测量。分析了测量装置的设计思路和测量精度的影响因素。理论分析和实验结果表明,该系统测量精度可达0.03m^-1。
A new vertex-power measurement method based on laser differential confoeal technique is proposed for the demand of high-precision back-vertex-power measurement. A vertex power measurement system is built up. This system takes advantage of outstanding focusing ability of laser differential con_focal system to improve the positioning accuracy, and uses the interferometer to measure the distance from the origin and finally gets the results by means of conversion of the formula. The component design specifications and influence factors are analyzed. Theoretical analysis and experimental results show that the measurement error of the method is about 0. 03 m^-1.
出处
《计量学报》
CSCD
北大核心
2014年第2期129-132,共4页
Acta Metrologica Sinica
关键词
计量学
激光差动共焦定焦
后顶焦度
定焦误差
校准
Metrology
Laser differential confocal focusing
Back-vertex-power
Focusing error
Calibration