摘要
本文针对超精加工面的测量特点，介绍近年来光学法检测表面粗糙度的进展。
In view of measuring characteristic of superfinish machining surface, the new progress on the optical technology for measuring surface crude degree in the recent years is presented in this paper.
出处
《光电子技术与信息》
2001年第4期43-45,共3页
Optoelectronic Technology & Information
