摘要
本文采用非平衡磁控溅射及等离子体源离子混合注入方法在奥氏体不锈钢 1Cr18N9Ti基体上制备N TiN Ti(N ,C) DLC梯度涂层。采用原子力显微镜 (AFM)及喇曼光谱等手段观察分析梯度膜的显微组织与相组成 ,同时采用了纳米压入技术评定膜层的力学性能。实验结果表明 ,采用此方法制备的金刚石膜组织致密 。
Diamond like carbon based gradient film coatings have been sued as solid lubricating coatings in vacuum technology because of their good physical and chemical properties.In this paper,the hybrid technique of unbalanced magnetron sputterion and plasma immersion ion implantation(PⅢ) was adopted to fabricate diamond like carbon based functionally gradient N/TiN/Ti(N,C)/DLC film on the 304 stainless steel substrate.Raman scattering spectroscopy and AFM were used to analyze the structure of the gradient film.The mechanical properties were evaluated by nano indentation.The results showed this DLC gradient film had good qualities as a solid lubricating coating.
出处
《材料科学与工程》
CSCD
北大核心
2002年第2期200-202,共3页
Materials Science and Engineering
基金
国家自然科学基金资助项目 (59971 0 30 )
